@article{article_345321, title={Al/Si3N4/p-Si aygıtının C-V characteristikleri üzerine metal ile yarıiletken kontak arasındaki yalıtkan tabakanın kalınlık etkisi}, journal={Pamukkale Üniversitesi Mühendislik Bilimleri Dergisi}, volume={23}, pages={536–542}, year={2017}, author={Orak, İkram and Koçyiğit, Adem}, keywords={Al/Si3N4/p- Si,Schottky,Capacitance behavior,MIS,Thickness effect}, abstract={<p> <!--[if !mso]> <style> v\:* {behavior:url(#default#VML);} o\:* {behavior:url(#default#VML);} w\:* {behavior:url(#default#VML);} .shape {behavior:url(#default#VML);} </style> <![endif]--> <!--[if gte mso 9]> <xml> <o:OfficeDocumentSettings> <o:RelyOnVML> </o:RelyOnVML> <o:AllowPNG> </o:AllowPNG> </o:OfficeDocumentSettings> </xml> <![endif]--> <!--[if gte mso 9]> <xml> <w:WordDocument> <w:View>Normal </w:View> <w:Zoom>0 </w:Zoom> <w:TrackMoves> </w:TrackMoves> <w:TrackFormatting> </w:TrackFormatting> <w:PunctuationKerning> </w:PunctuationKerning> <w:ValidateAgainstSchemas> 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