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Characterization of NiTi SMA Thin Film by Temperature Dependent X-Ray Diffraction and Identification of Phases

Year 2019, , 1 - 11, 30.09.2019
https://doi.org/10.35193/bseufbd.549878

Abstract



Thin film shape memory alloy which
is strongly relevant with the fabrication of the micro electro mechanical
systems is one of the hot research topic in last decades. Among the
investigated shape memory alloys
, NiTi is stepping forward by the thermos-elastic
features it has. In order to understand their physical properties,
several
characterization methods have been used by the researchers. In this study, a
NiTi thin film that is deposited on a Si substrate is characterized by
an X-Ray
Diffraction under gradually evolving testing temperatures. The examination is
performed between -125
°C and
125
°C. Two
stoichiometrically different samples (at room temperature, one of them is
martensite rich and the other is austenite rich)
are tested and the phase
transformation temperatures are determined (martensite and austenite start and
finish temperatures) during the experiments.
Furthermore, by using the direct
comparison method, the martensite volume fraction is determined with regard to
temperature.




several characterization methods have been used by the researchers. In this study, a NiTi thin film that is deposited on a Si substrate is characterized byseveral
characterization methods have been used by the researchers. In this study, a
NiTi thin film that is deposited on a Si substrate is characterized by

References

  • [1] Miyazaki, S. & A. Ishida. (1999). Martensitic transformation and shape memory behavior in sputter-deposited TiNi-base thin films. Materials Science and Engineering: A, 273-275, 106-133.
  • [2] Fu, Y., H. Du, W. Huang, S. Zhang & M. Hu. (2004). TiNi-based thin films in MEMS applications: a review. Sensors and Actuators A: Physical, 112(2-3), 395-408.
  • [3] Kahn, H., M.A. Huff & A.H. Heuer. (1998). The TiNi shape-memory alloy and its applications for MEMS. Journal of Micromechanics and Microengineering, 8(3), 213-221.
  • [4] Çakmak, Ö. & M. Kaya. (2017). Akıllı Malzeme Şekil Hafızalı Alaşımların Termodinamiği. Nevşehir Bilim ve Teknoloji Dergisi, 6(2), 541-555.
  • [5] Kaya, M. (2008). Toz metalurjisi ile üretilen NiTi şekil hatırlamalı alaşımların metalurjik ve mekanik karakteristiklerinin incelenmesi. Doktora Tezi, Fırat Üniversitesi, Fen Bilimleri Enstitüsü, Elazığ.
  • [6] Kaya, M., Ö. Çakmak, T.Y. Saygılı & K.C. Atlı. (2016). Şekil hafızalı alaşımlarda martensitik faz dönüşümü ve şekil hafıza mekanizması. Selçuk Teknik Dergisi, 15(3).
  • [7] Fu, Y., W. Huang, H. Du, X. Huang, J. Tan & X. Gao. (2001). Characterization of TiNi shape-memory alloy thin films for MEMS applications. Surface and Coatings Technology, 145(1-3), 107-112.
  • [8] Shih, C.L., B.K. Lai, H. Kahn, S.M. Phillips & A.H. Heuer. (2001). A robust co-sputtering fabrication procedure for TiNi shape memory alloys for MEMS. Journal of Microelectromechanical Systems, 10(1), 69-79.
  • [9] Liu, Y.S., D. Xu, B.H. Jiang, Z.Y. Yuan & P.V. Houtte. (2005). The effect of crystallizing procedure on microstructure and characteristics of sputter-deposited TiNi shape memory thin films. Journal of Micromechanics and Microengineering, 15(3), 575-579.
  • [10] Mohri, M., M. Nili-Ahmadabadi & V.S.K. Chakravadhanula. (2015). Crystallization study of amorphous sputtered NiTi bi-layer thin film. Materials Characterization, 103, 75-80.
  • [11] Tillmann, W. & S. Momeni. (2015). In-situ annealing of NiTi thin films at different temperatures. Sensors and Actuators A: Physical, 221, 9-14.
  • [12] Sanjabi, S., M. Naderi, H.Z. Bidaki & S.K. Sadrnezhaad. (2009). Characterization of Sputtered NiTi Shape Memory Alloy Thin Films. Scientia Iranica - International Journal of Science and Technology, 16(3), 248-252.
  • [13] Hou, H., R.F. Hamilton & M.W. Horn. (2016). Narrow thermal hysteresis of NiTi shape memory alloy thin films with submicrometer thickness. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 34(5).
  • [14] Makino, E., M. Uenoyama & T. Shibata. (1998). Flash evaporation of TiNi shape memory thin film for microactuators. Sensors and Actuators A: Physical, 71(3), 187-192.
  • [15] Koker, M.K.A., J. Schaab, N. Zotov & E.J. Mittemeijer. (2013). X-ray diffraction study of the reverse martensitic transformation in NiTi shape memory thin films. Thin Solid Films, 545, 71-80.
  • [16] Cullity, B.D. (1978). Elements of X-Ray Diffraction, Second ed. Addison-Wesley Publishing Company, Inc., Reading, MA, 102.

Ni-Ti Akıllı Alaşım İnce Filmin Sıcaklığa Bağlı X-Ray Kırınımı ile Karakterizasyonu ve Faz Dönüşümü Tespiti

Year 2019, , 1 - 11, 30.09.2019
https://doi.org/10.35193/bseufbd.549878

Abstract

Günümüzün popüler konularından olan ince film akıllı alaşımlar, her
geçen yıl ihtiyaç ölçüsünde daha da küçülen mikro elektromekanik sistemlerdir.
Bu alaşımlardan NiTi ince film, sahip olduğu termoelastik özellikler sayesinde
yaygın olarak tercih edilmektedir. Depolanan bu filmlerin fiziksel
özelliklerinin anlaşılabilmesi için birçok karakterizasyon yöntemi mevcuttur.
Bu çalışmada silikon altlık üzerine depolanmış Nikel-Titanyum ince filmin faz
dönüşümü sıcaklığa bağlı X-Ray kırınımı ile incelenmiştir. İncelenen sıcaklık aralığı
-125
°C ile 125°C olarak alınmıştır. Stokiyometrik olarak birbirinden
farklı iki NiTi örneği (oda sıcaklığında biri austenit diğeri martensit
oranları daha yüksek olan) incelenmiş ve her bir filmin faz dönüşüm
sıcaklıkları (austenit başlangıç ve bitiş, martensit başlangıç ve bitiş) tespit
edilmiştir. Direkt karşılaştırma yöntemi kullanılarak işlem esnasındaki martensit
hacim oranı sıcaklığa bağlı olarak elde edilmiştir.




References

  • [1] Miyazaki, S. & A. Ishida. (1999). Martensitic transformation and shape memory behavior in sputter-deposited TiNi-base thin films. Materials Science and Engineering: A, 273-275, 106-133.
  • [2] Fu, Y., H. Du, W. Huang, S. Zhang & M. Hu. (2004). TiNi-based thin films in MEMS applications: a review. Sensors and Actuators A: Physical, 112(2-3), 395-408.
  • [3] Kahn, H., M.A. Huff & A.H. Heuer. (1998). The TiNi shape-memory alloy and its applications for MEMS. Journal of Micromechanics and Microengineering, 8(3), 213-221.
  • [4] Çakmak, Ö. & M. Kaya. (2017). Akıllı Malzeme Şekil Hafızalı Alaşımların Termodinamiği. Nevşehir Bilim ve Teknoloji Dergisi, 6(2), 541-555.
  • [5] Kaya, M. (2008). Toz metalurjisi ile üretilen NiTi şekil hatırlamalı alaşımların metalurjik ve mekanik karakteristiklerinin incelenmesi. Doktora Tezi, Fırat Üniversitesi, Fen Bilimleri Enstitüsü, Elazığ.
  • [6] Kaya, M., Ö. Çakmak, T.Y. Saygılı & K.C. Atlı. (2016). Şekil hafızalı alaşımlarda martensitik faz dönüşümü ve şekil hafıza mekanizması. Selçuk Teknik Dergisi, 15(3).
  • [7] Fu, Y., W. Huang, H. Du, X. Huang, J. Tan & X. Gao. (2001). Characterization of TiNi shape-memory alloy thin films for MEMS applications. Surface and Coatings Technology, 145(1-3), 107-112.
  • [8] Shih, C.L., B.K. Lai, H. Kahn, S.M. Phillips & A.H. Heuer. (2001). A robust co-sputtering fabrication procedure for TiNi shape memory alloys for MEMS. Journal of Microelectromechanical Systems, 10(1), 69-79.
  • [9] Liu, Y.S., D. Xu, B.H. Jiang, Z.Y. Yuan & P.V. Houtte. (2005). The effect of crystallizing procedure on microstructure and characteristics of sputter-deposited TiNi shape memory thin films. Journal of Micromechanics and Microengineering, 15(3), 575-579.
  • [10] Mohri, M., M. Nili-Ahmadabadi & V.S.K. Chakravadhanula. (2015). Crystallization study of amorphous sputtered NiTi bi-layer thin film. Materials Characterization, 103, 75-80.
  • [11] Tillmann, W. & S. Momeni. (2015). In-situ annealing of NiTi thin films at different temperatures. Sensors and Actuators A: Physical, 221, 9-14.
  • [12] Sanjabi, S., M. Naderi, H.Z. Bidaki & S.K. Sadrnezhaad. (2009). Characterization of Sputtered NiTi Shape Memory Alloy Thin Films. Scientia Iranica - International Journal of Science and Technology, 16(3), 248-252.
  • [13] Hou, H., R.F. Hamilton & M.W. Horn. (2016). Narrow thermal hysteresis of NiTi shape memory alloy thin films with submicrometer thickness. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 34(5).
  • [14] Makino, E., M. Uenoyama & T. Shibata. (1998). Flash evaporation of TiNi shape memory thin film for microactuators. Sensors and Actuators A: Physical, 71(3), 187-192.
  • [15] Koker, M.K.A., J. Schaab, N. Zotov & E.J. Mittemeijer. (2013). X-ray diffraction study of the reverse martensitic transformation in NiTi shape memory thin films. Thin Solid Films, 545, 71-80.
  • [16] Cullity, B.D. (1978). Elements of X-Ray Diffraction, Second ed. Addison-Wesley Publishing Company, Inc., Reading, MA, 102.
There are 16 citations in total.

Details

Primary Language Turkish
Subjects Engineering
Journal Section Articles
Authors

Mehmet Mete Öztürk This is me

Bahadır Doğan

Publication Date September 30, 2019
Submission Date April 5, 2019
Acceptance Date July 30, 2019
Published in Issue Year 2019

Cite

APA Öztürk, M. M., & Doğan, B. (2019). Ni-Ti Akıllı Alaşım İnce Filmin Sıcaklığa Bağlı X-Ray Kırınımı ile Karakterizasyonu ve Faz Dönüşümü Tespiti. Bilecik Şeyh Edebali Üniversitesi Fen Bilimleri Dergisi, 6, 1-11. https://doi.org/10.35193/bseufbd.549878